Optymalizacja konstrukcyjna układu interferometrycznego do pomiaru mikroodchyleń kątowych *
Optimization of the design of the interferometer for angular micro deflection measurement
Mechanik nr 11/2016 - XVI Krajowa VII Międzynarodowa Konferencja Naukowo-Techniczna „Metrologia w technikach wytwarzania”
STRESZCZENIE: Przedstawiono metodę i interferencyjny czujnik do pomiaru wzajemnych mikroodchyleń kątowych wiązki laserowej i czujnika. Przeanalizowano wybrane konfiguracje układów optycznych. Oceniono wpływ błędów wykonania elementów optycznych w wybranym układzie interferometru.
SŁOWA KLUCZOWE: pomiary odchyleń kątowych, interferometr laserowy
ABSTRACT: Method and the interference sensor for measuring micro-deviations of a laser beam in relation to the sensor is presented. Selected configurations of optical system are analyzed. Influence of fabrication errors in optical components in the selected layout is presented.
KEYWORDS: measurement of the angular deflection, laser interferometer
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